PVA TePla AG
PVA TePla is a global group of diverse high-tech companies. Leveraging decades of experience and a forward-thinking approach to innovation, they develop unparalleled systems for vacuum, high-temperature, plasma processes, and quality inspection. Their development always occurs in close collaboration with customers. K&P and PVA TePla AG have maintained a broad and successful partnership in the Japanese market for over ten years.
Partners
PVA Metrology and Plasma Solutions GmbH
PVA Metrology & Plasma Solutions is the specialized division of PVA TePla AG dedicated to advancing technology in semiconductor manufacturing.
They possess deep expertise in fabrication processes for semiconductor, micromechanical, and optoelectronic components.
In addition to plasma processing, they provide expert support through innovative laser measurement and VPD analytical methodologies.
The GIGA 690 is a low-pressure microwave plasma system succeeding the PS400 and PS660 models. Since its 2008 launch, it has earned high market acclaim for cleaning and surface activation in semiconductor packaging.
Ideal for die-attach pretreatment, wire bonding, flip-chip underfill, and encapsulation, it delivers high-speed, low-damage results.
The system supports both manual and automatic operation with SEMI-compliant software.
VPD Wafer Surface Inspection Systems: WSPS & WSMS
These systems offer a seamless solution for wafer inspection, managing everything from layer decomposition to surface recovery.
The integrated WSMS unit fully automates the process, including pre-recovery liquid preparation and post-recovery ICP-MS analysis.
PVA TePla’s VPD technology detects trace elements on the wafer at both early and intermediate stages of the production chain, with detection limits as low as 1E7 at/cm².
By identifying production bottlenecks at an early stage, these systems help prevent unnecessary additional costs and ensure maximum efficiency.
PVA Crystal Growing Systems GmbH
With over 1,000 systems sold and a wealth of technical expertise, this company has supported clients in the production of high-purity single crystals for more than 60 years.
The semiconductor, photovoltaic, and electronics industries, along with R&D sectors, benefit from their high-performance systems and extensive service offerings.
Through bespoke plant design and expert project execution, they enable the growth of high-quality crystals tailored precisely to meet each customer's specific needs.
SiC Crystal Growth Furnaces / SiCam Gen4 (Product Handled)• Silicon Carbide Crystal Growth Furnaces (PVT) Sublimation Method Furnaces
Floating Zone Crystal Growth Furnace - FZ (Our Product Line)• About the Floating Zone (FZ) Method:A crucible-free process where a high-purity single crystal is grown by locally heating and melting a raw material rod, supported by surface tension, and slowly moving the molten zone.• These furnaces are primarily used for growing silicon single crystals for power semiconductors.
PVA Vacuum Plant Engineering Jena GmbH
PVA TePla AG is a major global high-tech group providing custom systems for vacuum, plasma, and high-heat processes.
PVA TePla AG is a global conglomerate of high-tech companies specializing in the manufacturing of customized systems for vacuum, high-temperature, and plasma processes, as well as quality inspection.The group's dedicated manufacturing division develops sophisticated, high-tech equipment distributed worldwide to various subsidiaries within the PVA TePla Group. Their primary internal clients include PVA Crystal Growing Systems GmbH and PVA Metrology & Plasma Solutions GmbH.
For these partner organizations, the company constructs advanced crystal growth systems for producing silicon and silicon carbide single-crystal ingots, which are essential for manufacturing semiconductor wafers. Additionally, they fabricate specialized equipment for plasma-based surface activation and ultra-precision cleaning, alongside high-end quality inspection systems designed for operation within diverse cleanroom environments.